MEMS Humidity Sensors Testing

We provide performance inspection services for MEMS humidity sensors. Following standard specifications including SJ 20760-1999, the inspection focuses on the humidity deviation indicator of sensors. By simulating diverse humidity environments, we accurately measure the humidity response characteristics of sensors, and evaluate their humidity detection accuracy in application scenarios such as industrial control, environmental monitoring and electronic equipment. Inspection results can be applied to sensor quality assessment, product selection and performance optimization, assisting enterprises in keeping products compliant with industrial standard requirements and boosting the operational reliability and stability of equipment.

Inspection Items

Humidity deviation, sole test item: humidity deviation

Inspection Standards

1、SJ 20760-1999 General Specification for Polymeric Humidity Sensors SJ 20760-1999 General Specification for Polymeric Humidity Sensors

2、SJ 20760-1999 General Specification for Polymeric Humidity Sensors Clause 4.6.3

3、IEC 61508-2:2010 Functional safety of electrical/electronic/programmable electronic safety-related systems - Part 2: Requirements for electrical/electronic/programmable electronic safety-related systems

4、ASTM D5230-19 Standard Test Method for Determination of Humidity in Gases Using Electronic Moisture Sensors

Inspection Instruments

Constant temperature and humidity chamber, humidity calibration unit, data acquisition system, precision hygrometer, sensor performance tester, signal analyzer, standard humidity generator

Key Indicators and Inspection Requirements

1. Measuring range: comply with product specifications, error ≤±2%FS；2. Accuracy Class: ≤ Class 0.5；3. Repeatability: ≤0.1%FS；4. Stability: annual drift ≤0.2%FS；5. Response time: ≤1s；6. Output signal: standard interface, distortion ≤1%.

Inspection Methods and Implementation Points

1. Conduct inspection in accordance with GB/T 18459-2019

2. Accuracy test: 5-point testing with standard signal source

3. Repeatability test: 10 repeated measurements at the rated point

4. Stability test: 24-hour test under constant temperature and humidity conditions

5. Response time test: record the time to reach 90% output under step humidity excitation

6. Environmental adaptability test: perform testing within -40℃~85℃

Precautions

1. Preheat instruments for no less than 30 minutes

2. The reference standard instruments shall be 3 accuracy grades superior to the DUT

3. Shield electromagnetic interference

4. Wire correctly to avoid equipment damage

5. Apply temperature compensation to test data

6. Carry out sealing inspection for waterproof sensors