Magnetron Coating Machine LMMC-T2013

Introduction

Magnetron Coating Machine has a sample stage of Ф 150 mm which can rotate up to a speed of 20 rpm. It features two magnetron targets and DC power supplies. The system is equipped with advanced advanced cooling for the magnetron and molecular pumps. Its dual chambers: a main chamber and a transition chamber allows for sputtering and loading samples without disrupting the vacuum. This design reduces the number of vacuum cycles, saving time.

This coating machine is designed to meet the rigorous requirements of modern laboratory operations, ensuring high precision, reliability, and ease of use for various experimental applications.

Applications

Magnetron Coating Machine  is used in fields such as material science, semiconductor manufacturing, and thin film technology. It is ideal for applications requiring precise multilayer coating of conductive metal films, such as in electronics, solar cells etc.

Specifications

Sample Stage Size	Ф 150 mm
Sample Stage Rotating Speed	1 to 20 rpm adjustable
Sample Stage Heating Temperature	≤ 500℃
Temperature Control Accuracy	± 1℃
Magnetron Sputtering Head Diameter	Ф 50.8 mm
Magnetron Sputtering Head Thickness	≤ 3 mm
Magnetron Sputtering Head Cooling Mode	Circulating water cooling
Magnetron Sputtering Head Water Flow Rate	≥ 10 L/min
Vacuum Chamber Size	Ф 325 × 500 mm
Vacuum Chamber Transition Cavity	Ф 150 × 150 mm
Vacuum Chamber Material	304
Vacuum Chamber Opening Mode	Top opening
Vacuum System	Molecular pump system
Molecular Pump Pumping Rate	600 L/s
Vacuum System Pressure	≤ 5 × 10-4 Pa
Gas Control	One channel
Gas Type	Argon
Flow Rate	200 sccm
Film Thickness Meter	Quartz Crystal
Resolution	0.10 Å
Sputter Power Supply	DC 500 W
Target Power Supply Quantity	1
Overall Power Supply	AC 220V, 50Hz
Total Power	6.5 kW
Dimension	1090 × 900 × 1250 mm
Packing Dimension 1	1220 × 1000 × 1520 mm
Packing Dimension 2	800 × 620 × 615 mm
Net Weight	395 kg
Gross Weight 1	384 kg
Gross Weight 2	74 kg

Features

Dual vacuum chambers

Automatic current and vacuum shut-off protections

Independent vacuum systems for each chamber

High sputtering power

Stainless steel construction for durability

FAQs

1. What are the key factors to consider when selecting this coating machine for laboratory use?

When selecting this coating machine, key factors include: 1) The instrument's precision and accuracy to meet experimental requirements; 2) Compatibility with the types of samples and applications you will be working with; 3) Ease of use and maintenance requirements; 4) Safety features to protect operators and samples; 5) Calibration and certification requirements; 6) Cost-effectiveness and long-term reliability; 7) Technical support and service availability from the supplier. Evaluating these factors ensures that the instrument meets your laboratory's specific needs.

2. How often should this coating machine be calibrated to ensure accurate results?

It is recommended to calibrate this coating machine at least once every 6-12 months under normal usage conditions. More frequent calibration (every 3-6 months) may be necessary if: 1) The instrument is used continuously for extended periods; 2) It is exposed to harsh environmental conditions (temperature fluctuations, humidity, dust); 3) It is used for critical applications requiring high precision; 4) The instrument has been moved or subjected to physical shock; 5) Calibration checks indicate significant deviations from standard values. Always follow the manufacturer's calibration guidelines.

3. What are the common maintenance procedures required for this coating machine?

Common maintenance procedures include: 1) Regular cleaning of the instrument's exterior and sample contact surfaces to prevent contamination and ensure proper operation; 2) Inspection of moving parts (if applicable) for wear and lubrication as recommended by the manufacturer; 3) Replacement of consumable parts (filters, bulbs, reagents) according to usage guidelines; 4) Verification of performance parameters (temperature, pressure, voltage) regularly; 5) Storage of the instrument in a clean, dry environment when not in use; 6) Keeping a maintenance log to track service activities and identify potential issues early; 7) Following the manufacturer's specific maintenance schedule for optimal performance and longevity.

4. Can this coating machine be used with different types of samples, and are there any compatibility considerations?

Yes, this coating machine can be used with a variety of sample types, but compatibility considerations are important: 1) Check if the instrument's materials are compatible with the chemical composition of your samples (avoid corrosive or reactive substances that may damage the instrument); 2) Ensure that the sample volume and concentration are within the instrument's recommended range; 3) For biological samples, consider sterility requirements and potential cross-contamination risks; 4) For volatile or hazardous samples, ensure proper ventilation and safety precautions are in place; 5) Consult the manufacturer's documentation for specific sample compatibility guidelines, and perform compatibility tests with new sample types before regular use.

5. What should be done if the coating machine malfunctions or produces inconsistent results?

If malfunctions or inconsistent results occur: 1) First, check the instrument's user manual for troubleshooting guidelines specific to the issue; 2) Verify that the instrument is properly calibrated and within its calibration period; 3) Inspect for obvious issues such as loose connections, damaged parts, or incorrect settings; 4) Clean the instrument thoroughly to remove any contamination that may affect results; 5) Repeat the experiment with a known standard sample to determine if the issue is with the instrument or the sample; 6) If the problem persists, discontinue use of the instrument to prevent further damage or inaccurate results; 7) Contact technical support or a qualified service technician for diagnosis and repair, providing details of the issue and any troubleshooting steps already performed.